Vacuum oven for 800 °C annealing Molibdenum Hot-chamber 0,6 x 0, 6 x 1,5m
(4 units per batch)
Cryogenic pumps, RGA
Temperature uniformity: ± 5° C
Temperature control: over 3 zones
Chamber is actively water cooled
1st and 2nd thermal shield layer: Molybdenum
Heaters: Molybdenum
Load temp control: 10 K-type tc
Chamber temp control: 4 S-type tc (3 + overtemp safety)
Usable working space: 600 x 600 x 1500 mm